Накупить товаров
в интернет-магазине!
в интернет-магазине!
| Главная | Каталог |
» Каталог
» Книги » Иностранные языки. Обучение. Чтение » Английский язык
Каталог товаров:
 |
Fundamental Principles of Optical Lithography. The Science of Microfabrication. Chris Mack3983 руб
This text comprises of ten detailed chapters as well as three appendices which provide problems at the end of each chapter. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. From the Contents: 1 - Introduction to Semiconductor Lithography 2 - Aerial Image Formation 3 - Standing Waves and Swing Curves 4 - Photoresist Exposure and Amplification Kinetics 5 - Photoresist Bake Effects 6 Photoresist Development 7 Critical Dimension Control 8 Resolution Enhancement Technologies 9 Lithography Simulation 10 Future Developments Описание: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. Из серии: Electronic Materials / Semiconductors 2007. This book presents a theoretical and practical treatment of the topic of lithography. |